JPS631311Y2 - - Google Patents
Info
- Publication number
- JPS631311Y2 JPS631311Y2 JP3409182U JP3409182U JPS631311Y2 JP S631311 Y2 JPS631311 Y2 JP S631311Y2 JP 3409182 U JP3409182 U JP 3409182U JP 3409182 U JP3409182 U JP 3409182U JP S631311 Y2 JPS631311 Y2 JP S631311Y2
- Authority
- JP
- Japan
- Prior art keywords
- plate
- transparent plate
- cover sheet
- sealing member
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007789 sealing Methods 0.000 claims description 29
- 238000002508 contact lithography Methods 0.000 claims description 9
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000004026 adhesive bonding Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3409182U JPS58138930U (ja) | 1982-03-11 | 1982-03-11 | 真空密着焼付機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3409182U JPS58138930U (ja) | 1982-03-11 | 1982-03-11 | 真空密着焼付機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58138930U JPS58138930U (ja) | 1983-09-19 |
| JPS631311Y2 true JPS631311Y2 (en]) | 1988-01-13 |
Family
ID=30045602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3409182U Granted JPS58138930U (ja) | 1982-03-11 | 1982-03-11 | 真空密着焼付機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58138930U (en]) |
-
1982
- 1982-03-11 JP JP3409182U patent/JPS58138930U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58138930U (ja) | 1983-09-19 |
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